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Our Research Center

This page introduces our laboratory’s main experimental work, including material preparation, surface treatment, thin-film processes, and characterization.

Metal Interface Engineering

  • Plasma-Power-Controlled Ar/N₂ Activation for Electroless Cu Deposition and Seed-Layer Adhesion on Heterogeneous Substrates.

  • Our addresses the challenges of heterogeneous integration in advanced packaging by employing plasma-assisted surface modification to tune the interface energy of various substrates (e.g., SiO₂, SiC, Si).

  • Enhance film density and adhesion strength while investigating the evolution mechanisms of Cu–Cu bonding interfaces on Heterogeneous Integration.

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Semiconductor Packaging and Bonding Technology

  • To mitigate package warpage and thermal fatigue, this research utilizes the non-hydrolytic sol–gel (NHSG) method to develop negative thermal expansion (NTE) materials, specifically Ti-doped ZrV₂O₇.

  • By optimizing the integration of NTE fillers into epoxy composites.

  • Our research enables precise thermal stress compensation within the package, providing low-warpage and high-durability structural solutions for next-generation high-power devices.

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Join our mailing list for updates on publications and events

臺中市西屯區福恩里台灣大道四段1727號科技路化材系館

(04) 2359-0121 #33214

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